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Problem Of Quartz Lined Fluidized Bed Reactor

2010810the present invention relates to a method for mass preparation of granular polycrystalline silicon in a fluidized bed reactor, comprising a a reactor tube, b a reactor shell encompassing the reactor tube, c an inner zone formed within the reactor tube, where a silicon particle bed is formed and silicon deposition occurs, and an outer zone formed in between the reactor shell and the.